IEC 60050-523:2018 

International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices

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Abstract

IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
It has the status of a horizontal standard in accordance with IEC Guide 108.

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Additional information

Publication typeInternational Standard
Publication date2018-12-06
Edition1.0
Available language(s)English/French
TC/SCTC 1 - Terminologyrss
ICS01.040.29 - Electrical engineering (Vocabularies)
31.080.99 - Other semiconductor devices
Pages47
File size1476 KB

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