IEC 60050-523:2018
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
Abstract
IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
It has the status of a horizontal standard in accordance with IEC Guide 108.
It has the status of a horizontal standard in accordance with IEC Guide 108.
Additional information
Publication type | International Standard |
---|---|
Publication date | 2018-12-06 |
Edition | 1.0 |
Available language(s) | English/French |
TC/SC | TC 1 - Terminologyrss |
ICS | 01.040.29 - Electrical engineering (Vocabularies) 31.080.99 - Other semiconductor devices |
Pages | 47 |
File size | 1476 KB |
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