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Reference IEC/TS 62622 ed1.0 withdrawn corrigendum
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Title Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
Publication date 2012-10-02
Format, price
(Swiss francs)
and language
210.- 40 pages
210.- 1620 Kb
 
Abstract IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.
Technical Committee 113 - Nanotechnology standardization for electrical and electronic products and systems  RSS
ICS Codes
07.030 Physics. Chemistry
*This group includes standards in the field of physics and chemistry as natural sciences
*Applied physics, see 17
*Chemical technology, see 71
 
Replaced by
Stability date 2015
 
Work in progress
ProjectStage codeForecast publication date
No project under development--


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