International Electrotechnical Commission

Publication detail

Reference	IEC 62047-1 ed1.0 withdrawn corrigendum	> preview
Title	Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Publication date	2005-09-27
Format, price (Swiss francs) and language	150.- 49 pages 150.- 679 Kb
Abstract	This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Technical Committee	47F - Micro-electromechanical systems
ICS Codes	31.080.99 Other semiconductor devices
Replaced by
Stability date	2014
Work in progress	Project Stage code Forecast publication date No project under development - -

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