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Reference IEC 60204-33 ed1.0 withdrawn corrigendum
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Title Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
Publication date 2009-12-10
Format, price
(Swiss francs)
and language
320.- 247 pages
320.- 2446 Kb
 
Abstract IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
Technical Committee 44 - Safety of machinery - Electrotechnical aspects  RSS
ICS Codes
13.110 Safety of machinery
*This group includes standards for general use

25.040.30 Industrial robots. Manipulators

29.020 Electrical engineering in general
*Including voltages, general electrical terminology, electrical documentation, electrical tables, safety, fire hazard testing, etc.
*Electrical diagrams and charts, see 01.100.25
*Electrical power stations, see 27.100
*Electromagnetic compatibility, see 33.100
 
Replaced by
Stability date 2016
 
Work in progress
ProjectStage codeForecast publication date
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