IEC > Webstore > Search > Register > Check out > Payment > Order confirmation

Publication detail

 
Reference IEC 62047-12 ed1.0 withdrawn corrigendum
> preview
Title Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Publication date 2011-09-13
Format, price
(Swiss francs)
and language
170.- 59 pages
170.- 1382 Kb
 
Abstract IEC 62047-12:2011 specifies a method for bending fatigue testing using resonant vibration of microscale mechanical structures of MEMS (micro-electromechanical systems) and micromachines. This standard applies to vibrating structures ranging in size from 10 μm to 1 000 μm in the plane direction and from 1 μm to 100 μm in thickness, and test materials measuring under 1 mm in length, under 1 mm in width, and between 0,1 μm and 10 μm in thickness. The main structural materials for MEMS, micromachine, etc. have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography. The MEMS structures often have higher fundamental resonant frequency and higher strength than macro structures. To evaluate and assure the lifetime of MEMS structures, a fatigue testing method with ultra high cycles (up to 1012) loadings needs to be established. The object of the test method is to evaluate the mechanical fatigue properties of microscale materials in a short time by applying high load and high cyclic frequency bending stress using resonant vibration.
Technical Committee 47F - Micro-electromechanical systems  RSS
ICS Codes
31.080.99 Other semiconductor devices
 
Replaced by
Stability date 2016
 
Work in progress
ProjectStage codeForecast publication date
No project under development--


Search

>> Advanced search

Quick access by ref. number



Basket

Your basket is empty
Your country is :
Your TVA is : You must login...

Payment

Accepted credit cards:
Prices in CHF (Swiss francs)
Request a pro forma to pay by bank transfer or cheque
Learn how to share your publications with your colleagues, using networking options
Prices in CHF (Swiss francs)
We accept the following credit cards:
To pay by bank transfer: request a pro forma
If you purchase regularly through the IEC Webstore you can open a corporate account

Just Published

>> Published in the last 30 days

Bestsellers

  1. IEC 60601-1-2 Ed. 4.0
  2. IEC 60825-1 Ed. 3.0
  3. IEC 60529 Ed. 2.2
  4. IEC 61000-4-5 Ed. 3.0
  5. IEC 60068-2-30 Ed. 3.0
  6. IEC 60079-0 Ed. 6.0
  7. IEC 60811-501 Ed. 1.0
  8. IEC 62133 Ed. 2.0
  9. IEC 60950-1 Ed. 2.2
  10. IEC 61000-4-2 Ed. 2.0