| Reference |
IEC/TS 62622 ed1.0 withdrawn corrigendum |
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|
| Title |
Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
|
| Publication date |
2012-10-02 |
Format, price
(Swiss francs)
and language |
 | 210.- |
| 40 pages |  | 210.- |
| 1620 Kb |
|
| |
| Abstract |
IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.
This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.
|
| Technical Committee |
113 - Nanotechnology standardization for electrical and electronic products and systems
|
| ICS Codes |
| 07.030 |
Physics. Chemistry
*This group includes standards in the field of physics and chemistry as natural sciences
*Applied physics, see 17
*Chemical technology, see 71 |
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| |
| Replaced by |
|
| Stability date |
2015 |
| |
| Work in progress |
| Project | Stage code | Forecast publication date |
|---|
| No project under development | - | - |
|
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