IEC 62047-1
IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
CHFÂ 250.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2016-01-06 |
| Edition | 2.0 |
| ICS | 31.080.99 |
| Stability date | 2027 |
| ISBN number | 9782832230992 |
| Pages | 66 |
| File size | 1.33 MB |
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