IEC 62047-30
IEC 62047-30:2017
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process
CHFÂ 115.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2017-09-15 |
| Edition | 1.0 |
| ICS | 31.080.99 31.140 |
| Stability date | 2027 |
| ISBN number | 9782832248201 |
| Pages | 20 |
| File size | 1.20 MB |
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