IEC 62047-34
IEC 62047-34:2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
CHFÂ 80.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2019-04-05 |
| Edition | 1.0 |
| ICS | 31.080.99 31.140 |
| Stability date | 2027 |
| ISBN number | 9782832267196 |
| Pages | 16 |
| File size | 1.15 MB |
Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation
Strengthen the means of implementation and revitalize the global partnership for sustainable development