IEC 62047-32
IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
CHF 115.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2019-01-24 |
| Edition | 1.0 |
| ICS | 31.080.99 |
| Stability date | 2026 |
| ISBN number | 9782832264553 |
| Pages | 37 |
| File size | 1.49 MB |
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