IEC 62047-21
IEC 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
CHFÂ 80.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2014-06-19 |
| Edition | 1.0 |
| ICS | 31.080.99 |
| Stability date | 2027 |
| ISBN number | 9782832216507 |
| Pages | 26 |
| File size | 1.57 MB |
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