IEC 62047-5
IEC 62047-5:2011/COR1:2012
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
CHFÂ 0.-
Technical committee
TC 47/SC 47F Micro-electromechanical systems| Publication type | International Standard |
| Publication date | 2012-03-08 |
| Edition | 1.0 |
| ICS | 31.080.99 |
| Stability date | 2026 |
| File size | 84.74 KB |
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