IEC 60204-33:2009
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
Abstract
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
Additional information
Publication type | International Standard |
---|---|
Publication date | 2009-12-10 |
Edition | 1.0 |
Available language(s) | English/French |
TC/SC | TC 44 - Safety of machinery - Electrotechnical aspectsrss |
ICS | 13.110 - Safety of machinery
25.040.30 - Industrial robots. Manipulators 29.020 - Electrical engineering in general |
Stability date | 2025 |
Pages | 247 |
File size | 2446 KB |
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