IEC/IEEE 62659:2015 

Nanomanufacturing - Large scale manufacturing for nanoelectronics

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Abstract

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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nanotechnology


Additional information

Publication typeInternational Standard
Publication date2015-09-30
Edition1.0
Available language(s)English
TC/SCTC 113 - Nanotechnology for electrotechnical products and systemsrss
ICS07.030 - Physics. Chemistry
07.120 - Nanotechnologies
25.020 - Manufacturing forming processes
Stability date  2019
Pages12
File size965 KB

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