IEC/IEEE 62659
IEC/IEEE 62659:2015
Nanomanufacturing - Large scale manufacturing for nanoelectronics
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
CHFÂ 80.-
Technical committee
TC 113 Nanotechnology for electrotechnical products and systemsKeywords
NanotechnologyPublication type | International Standard |
Publication date | 2015-09-30 |
Edition | 1.0 |
ICS | 07.030 07.120 25.020 |
Stability date | 2025 |
ISBN number | 9782832229156 |
Pages | 12 |
File size | 942.75 KB |
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