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IEC/IEEE 62659

IEC/IEEE 62659:2015
Nanomanufacturing - Large scale manufacturing for nanoelectronics
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
BASE PUBLICATION
English
  CHF 80.-

Technical committee

TC 113 Nanotechnology for electrotechnical products and systems

Keywords

Nanotechnology
Publication typeInternational Standard
Publication date2015-09-30
Edition1.0
ICS

07.030

07.120

25.020

Stability date2025
ISBN number9782832229156
Pages12
File size942.75 KB
EditionDatePublicationEditionStatus
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