IEC/IEEE 62659:2015
Nanomanufacturing - Large scale manufacturing for nanoelectronics
Abstract
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
Additional information
Publication type | International Standard |
---|---|
Publication date | 2015-09-30 |
Edition | 1.0 |
Available language(s) | English |
TC/SC | TC 113 - Nanotechnology for electrotechnical products and systemsrss |
ICS | 07.030 - Physics. Chemistry
07.120 - Nanotechnologies 25.020 - Manufacturing forming processes |
Stability date | 2025 |
Pages | 12 |
File size | 965 KB |
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