IEC 62047-34:2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Abstract
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
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Additional information
| Publication type | International Standard |
|---|---|
| Publication date | 2019-04-05 |
| Edition | 1.0 |
| Available language(s) | English |
| TC/SC | TC 47/SC 47F - Micro-electromechanical systemsrss |
| ICS | 31.080.99 - Other semiconductor devices 31.140 - Piezoelectric devices |
| Stability date | 2024 |
| Pages | 16 |
| File size | 1206 KB |
The following test report forms are related:
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