IEC 62047-28:2017 

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices


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IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

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Additional information

Publication typeInternational Standard
Publication date2017-01-20
Available language(s)English
TC/SCTC 47 - Semiconductor devicesrss
ICS31.080.99 - Other semiconductor devices
Stability date  2025
File size1521 KB

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