IEC 62047-28:2017 

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

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Abstract

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
 

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Additional information

Publication typeInternational Standard
Publication date2017-01-20
Edition1.0
TC/SCTC 47/SC 47F - Micro-electromechanical systemsrss
ICS31.080.99 - Other semiconductor devices
Stability date2021
Hardcopy17  pages
File size1521 KB

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