IEC 62047-33:2019 

Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device

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Abstract

IEC 62047-33:2019 (E) defines terms, definitions, essential ratings and characteristics, as well as test methods applicable to MEMS piezoresistive pressure-sensitive device. This document applies to piezoresistive pressure-sensitive devices for automotive, medical treatment, electronic products.

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Additional information

Publication typeInternational Standard
Publication date2019-04-05
Edition1.0
Available language(s)English
TC/SCTC 47/SC 47F - Micro-electromechanical systemsrss
ICS31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Stability date  2024
Pages24
File size1325 KB

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