IEC TR 63258:2021
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Abstract
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
Additional information
Publication type | Technical Report |
---|---|
Publication date | 2021-03-19 |
Edition | 1.0 |
Available language(s) | English |
TC/SC | TC 113 - Nanotechnology for electrotechnical products and systemsrss |
ICS | 07.120 - Nanotechnologies |
Stability date | 2025 |
Pages | 21 |
File size | 1382 KB |
The following test report forms are related:
Share your publications
Learn how to share your publications with your colleagues, using networking options.
Payment information
Our prices are in Swiss francs (CHF). We accept all major credit cards (American Express, Mastercard and Visa, JCB and CUP), PayPal and bank transfers as form of payment.
Keep in touch
Keep up to date with new publication releases and announcements with our free IEC Just Published email newsletter.
Contact customer services
Please send your enquiry by email or call us on +41 22 919 02 11 between 09:00 – 16:00 CET Monday to Friday.