IEC TR 63258:2021 

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

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Additional information

Publication typeTechnical Report
Publication date2021-03-19
Edition1.0
Available language(s)English
TC/SCTC 113 - Nanotechnology for electrotechnical products and systemsrss
ICS07.120 - Nanotechnologies
Stability date  2025
Pages21
File size1382 KB

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