IEC 62047-30:2017 PRV 
Pre release version

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film


Do you need a multi-user copy?



This Final Draft International Standard is an up to 6 weeks' pre-release of the official publication. It is available for sale during its voting period: 2017-07-14 to 2017-08-25. By purchasing this FDIS now, you will automatically receive, in addition, the final publication.

IEC 62047-30:2017 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

Look inside

Additional information

Publication typeInternational Standard
Publication date2017-07-14
Available language(s)English
TC/SCTC 47/SC 47F - Micro-electromechanical systemsrss
ICS31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Stability date  2022
File size1212 KB

Share your publications

Learn how to share your publications with your colleagues, using networking options.

Payment information

Our prices are in Swiss francs (CHF). The following credit cards are accepted: American express, Mastercard and Visa. Request a pro forma to pay by bank transfer.

Keep in touch

Keep up to date with new publication releases and announcements with our free IEC Just Published email newsletter.

Contact customer services

Please send your enquiry by email or call us on +41 22 919 02 11 between 09:00 – 17:00 CET Monday to Friday.