IEC 62047-30:2017 PRV
Pre release version
Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
AbstractThis Final Draft International Standard is an up to 6 weeks' pre-release of the official publication. It is available for sale during its voting period: 2017-07-14 to 2017-08-25. By purchasing this FDIS now, you will automatically receive, in addition, the final publication.
IEC 62047-30:2017 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.
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