IEC 62047-1:2005 Withdrawn
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Abstract
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
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Additional information
| Publication type | International Standard |
|---|---|
| Publication date | 2005-09-27 |
| Withdrawal date | 2016-01-06 |
| Edition | 1.0 |
| Available language(s) | English/French, Russian |
| TC/SC | TC 47/SC 47F - Micro-electromechanical systemsrss |
| ICS | 31.080.99 - Other semiconductor devices |
| Stability date | 2016 |
| Pages | 49 |
| File size | 1202 KB |
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