Semiconductor devices - Micro-electromechanical devices - Part 37: Environmental test methods of MEMS piezoelectric thin films for sensor application
This document does not cover reliability assessments, such as methods of predicting the lifetime of a piezoelectric thin film based on a Weibull distribution.
|Publication type||International Standard|
|TC/SC||TC 47/SC 47F - Micro-electromechanical systemsrss|
|ICS||31.080.99 - Other semiconductor devices|
31.140 - Piezoelectric devices
|File size||1612 KB|
The following test report forms are related:
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