IEC 60050-523:2018 

International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices

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Abstract

IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.

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Additional information

Publication typeInternational Standard
Publication date2018-12-06
Edition1.0
Available language(s)English/French
TC/SCTC 1 - Terminologyrss
ICS01.040.29 - Electrical engineering (Vocabularies)
31.080.99 - Other semiconductor devices
Pages47
File size1445 KB

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