IEC 62047-34:2019 PRV
Pre release version
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34 ED1 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
|Publication type||International Standard|
|TC/SC||TC 47/SC 47F - Micro-electromechanical systemsrss|
|ICS||31.080.99 - Other semiconductor devices|
31.140 - Piezoelectric devices
|File size||1098 KB|
The following test report forms are related:
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