IEC 62047-34:2019 PRV 
Pre release version

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

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Abstract

This Final Draft International Standard is an up to 6 weeks' pre-release of the official publication. It is available for sale during its voting period: 2019-01-25 to 2019-03-08. By purchasing this FDIS now, you will automatically receive, in addition, the final publication.

IEC 62047-34 ED1 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

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Additional information

Publication typeInternational Standard
Publication date2019-01-25
Edition1.0
Available language(s)English
TC/SCTC 47/SC 47F - Micro-electromechanical systemsrss
ICS31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Stability date  2024
Pages16
File size1098 KB

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