IEC 62374:2007 

Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

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Abstract

Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

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Additional information

Publication typeInternational Standard
Publication date2007-03-29
Edition1.0
Available language(s)English/French
TC/SCTC 47 - Semiconductor devicesrss
ICS31.080.99 - Other semiconductor devices
Stability date  2025
Pages43
File size735 KB

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