IEC 62374
IEC 62374:2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
CHFÂ 155.-
Technical committee
TC 47 Semiconductor devicesPublication type | International Standard |
Publication date | 2007-03-29 |
Edition | 1.0 |
ICS | 31.080.99 |
Stability date | 2031 |
ISBN number | 2831890020 |
Pages | 43 |
File size | 717.44 KB |
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