IEC 62374:2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
Abstract
Provides a test method of Time Dependent Dielectric Breakdown
(TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
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Additional information
| Publication type | International Standard |
|---|---|
| Publication date | 2007-03-29 |
| Edition | 1.0 |
| Available language(s) | English/French |
| TC/SC | TC 47 - Semiconductor devicesrss |
| ICS | 31.080.99 - Other semiconductor devices |
| Stability date | 2025 |
| Pages | 43 |
| File size | 735 KB |
The following test report forms are related:
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