IEC TS 62622:2012
Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
|Publication type||Technical Specification|
|TC/SC||TC 113 - Nanotechnology for electrotechnical products and systemsrss|
|ICS||07.030 - Physics. Chemistry
07.120 - Nanotechnologies
|File size||1620 KB|
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