IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Abstract
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
Additional information
Publication type | International Standard |
---|---|
Publication date | 2016-01-06 |
Edition | 2.0 |
Available language(s) | English/French |
TC/SC | TC 47/SC 47F - Micro-electromechanical systemsrss |
ICS | 31.080.99 - Other semiconductor devices |
Stability date | 2024 |
Pages | 66 |
File size | 1392 KB |
The following test report forms are related:
Share your publications
Learn how to share your publications with your colleagues, using networking options.
Payment information
Our prices are in Swiss francs (CHF). We accept all major credit cards (American Express, Mastercard and Visa, JCB and CUP), PayPal and bank transfers as form of payment.
Keep in touch
Keep up to date with new publication releases and announcements with our free IEC Just Published email newsletter.
Contact customer services
Please send your enquiry by email or call us on +41 22 919 02 11 between 09:00 – 16:00 CET Monday to Friday.