IEC 62047-1:2016 

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions


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IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

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Additional information

Publication typeInternational Standard
Publication date2016-01-06
Available language(s)English/French
TC/SCTC 47/SC 47F - Micro-electromechanical systemsrss
ICS31.080.99 - Other semiconductor devices
Stability date  2023
File size1392 KB

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