IEC 62899-503-3:2021 

Printed electronics - Part 503-3: Quality assessment - Measuring method of contact resistance for the printed thin film transistor - Transfer length method

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Abstract

IEC 62899-503-3:2021(E) specifies a measuring method of contact resistance for printed thin film transistors (TFTs) by the transfer length method (TLM). The method requires the fabrication of a test element group (TEG) with varying channel length (L) between source and drain electrodes. The method is intended for quality assessment of TFT electrode contacts and is suited for determining whether the contact resistance lies within a desired range.

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Additional information

Publication typeInternational Standard
Publication date2021-08-24
Edition1.0
Available language(s)English
TC/SCTC 119 - Printed Electronicsrss
ICS29.045 - Semiconducting materials
31.080.30 - Transistors
Stability date  2026
Pages13
File size1217 KB

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