Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
|Publication type||International Standard|
|TC/SC||TC 47/SC 47F - Micro-electromechanical systemsrss|
|ICS||31.080.99 - Other semiconductor devices|
31.140 - Piezoelectric devices
|File size||1260 KB|
The following test report forms are related:
Share your publications
Learn how to share your publications with your colleagues, using networking options.
Our prices are in Swiss francs (CHF). We accept all major credit cards (American Express, Mastercard and Visa), PayPal and bank transfers as form of payment.
Keep in touch
Keep up to date with new publication releases and announcements with our free IEC Just Published email newsletter.
Contact customer services
Please send your enquiry by email or call us on +41 22 919 02 11 between 09:00 – 17:00 CET Monday to Friday.