Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
|Publication type||International Standard|
|TC/SC||TC 47/SC 47F - Micro-electromechanical systemsrss|
|ICS||31.080.99 - Other semiconductor devices|
31.140 - Piezoelectric devices
|File size||1260 KB|
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