IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
Abstract
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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Additional information
| Publication type | International Standard |
|---|---|
| Publication date | 2019-01-24 |
| Edition | 1.0 |
| Available language(s) | English/French |
| TC/SC | TC 47/SC 47F - Micro-electromechanical systemsrss |
| ICS | 31.080.99 - Other semiconductor devices |
| Stability date | 2023 |
| Pages | 37 |
| File size | 1563 KB |
The following test report forms are related:
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